KLA-Tencor to Unveil Surfscan SP3
According to Digitimes, KLA-Tencor has announced a new generation in the Surfscan family of wafer defect and surface quality inspection systems: the Surfscan SP3. As the first unpatterned wafer inspection platform to incorporate deep-ultraviolet (DUV) illumination, the Surfscan SP3 systems feature advances in sensitivity and throughput over their predecessor, the Surfscan SP2XP. The Surfscan SP3 [...]
